SIL – Automatic microscope wafer loader

SIL8000 wafer autoloader represents the most effective system to automatically load wafers on a microscope. It is a compact unit, featured by a structure which makes possible to load wafers on almost any microscope without the need of complex interfaces and without need to change the microscope stage.

This wafer loader-unloader has been designed with some goals in mind: Safety, Affordability, Fast handling, Easy use.

In one word: a S.A.F.E. Wafer Handling

“S” as SAFE

SIL has several features to ensure the safest wafer handling to avoid any possible damage to your precious devices. Our autoloader is CE and SEMI compliant.

Wafer protrusion sensor and cross slot detection protect your devices from operator errors. A reliable wafer position measurement, with the evaluation of the critical distance between two wafers, allows a safe handling of wafers even with high bow and warpage.

SIL loader is now featured by our autorecipe tool, which makes possible to define a new cassette profile with a simple guided operation and without the need of complex setups.

Once done autorecipe, the loader will be able to handle wafers of any thickness from 200μm to 1000μm, by automatically adapting the pickup levels to the real wafer positions as measured by a laser mapping sensor.

As an option, the system can be equipped with a rotating microscope chuck with a motorized return to the initial position; this allows the handling of wafers without the risk to touch the carrier when placing them back.

“A” as AFFORDABLE

S.A.F.E. – Safe, Affordable, Fast and Easy wafer loader

An extremely very low Total Cost of Ownership (TCO) is achieved by a high reliable design where all components are well sized to withstand heavy loads (even MEMS bonded wafer) without maintenance.

A simple macro inspection can be performed with an optional bright light source .

Installation and setup times are reduced to the minimum possible.

“F” as FAST

To increase the productivity, it features different wafer selection methods to cover any inspection need. The immediate wafer access and selection makes the system extremely easy, fast to setup and friendly to use.

“E” as EASY

The system is featured by a powerful computer control with graphical touch screen and an user friendly interface.

Software screenshot

Its software includes recipe management to easily switch between different handling configurations like wafer thickness and bow or warpage;

Automatically detecting wafer size, it changes its configuration without any hardware modification.

The operator need to One-click only to start working.

Our autoloader has been designed for Leica DM8000 and it can be used with microscopes of several brands like Nikon, Olympus, Zeiss, KLA-Vistec, INM100, INM200, DM4000 and DM6000 Leica.

Main features

• High speed, safe and smooth wafer handling
• Automatic wafer size detection
• Full set of inspection type come as standard: All wafers, programmed, random and statistical
• Cassette laser mapping, wafer protrusion, cross-slot detection and critical handling conditions come as standard safety features
• PC based controller, Windows 7
• Touch screen interface
• Designed for Leica DM8000, compatible with many semiconductor inspection microscopes like Nikon, Olympus, Zeiss
• Basic bright light inspection available as option

Autoloader specifications