RSIL is our cost effective review station composed by  RWMAP software and a SIL loader.

It can be used to analyze wafer defects with full map management when a complete macro inspection it is not needed.

These modified SIL units are equipped with an optical wafer centering to allow a precise positioning on microscope chuck

OCR reading is available and it can be used to automatically identify  the wafer mark ID for map downloading and uploading